Gas dynamic aspects of the work of a cryogenic vacuum pump in the viscous mode of gas flow

UDC 621.521

Gas dynamic aspects of the work of a cryogenic vacuum pump in the viscous mode of gas flow

Ivanov V.I.


Abstract
When a cryopump is working in the viscous mode, an ordered gas flow is observed towards the cryopanel. The offered method makes it possible to calculate the speed of the pumped gas flow in front of the cryopanel using its capture ratio and subsequently measure the speed of its transfer.

Keywords: cryogenic vacuum pump, gas molecule, liquid nitrogen, pumping speed.


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