Authors

Gas dynamic aspects of the work of a cryogenic vacuum pump in the viscous mode of gas flow

UDC 621.521

Gas dynamic aspects of the work of a cryogenic vacuum pump in the viscous mode of gas flow

Ivanov V.I.

Abstract
When a cryopump is working in the viscous mode, an ordered gas flow is observed towards the cryopanel. The offered method makes it possible to calculate the speed of the pumped gas flow in front of the cryopanel using its capture ratio and subsequently measure the speed of its transfer.

Keywords: cryogenic vacuum pump, gas molecule, liquid nitrogen, pumping speed.

All references

1. Abramovich G. N. Prikladnaja gazovaja dinamika. – M.: Nauka, 1969.

2. Spravochnik po fiziko-tehnicheskim osnovam kriogeniki / Pod red. M. P. Malkova. – M.: Jenergoatomizdat, 1985.

3. Brown R. F., Wang E. S. V. Capture coefficients of gases at 77 K. Adv. in cryogenic engineering. 1965. Vol. 10.

4. Bland M. E. The cryopuming of water vapour in the continuum pressure region. Cryogenics. 1975. Vol. 15. N 11.

Read the full article

Русский

This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License

Authors

Archive

Gas dynamic aspects of the work of a cryogenic vacuum pump in the viscous mode of gas flow

Gas dynamic aspects of the work of a cryogenic vacuum pump in the viscous mode of gas flow

Founders

Partnerships